Vacuum Pumps
Discover our full portfolio of efficient and reliable vacuum pumps.
Our range of high-quality vacuum pumps include dry and wet technologies such as screw, rotary vane, scroll pumps, turbomolecular, diffusion pumps, liquid ring vacuum pumps and more.
Offering excellent corrosion resistance, low vibration, and quiet operation, our pumps are engineered to handle even the toughest of applications.
Every Edwards pump and component will live up to its trusted name in vacuum technology.
Pumps
Category
- CDX Dry Screw (1)
- D-Lab Diaphragm Pumps (8)
- Diaphragm Pumps (10)
- Diffstak Vapour Pumps (16)
- Diffusion Pumps (23)
- Dry Claw Pumps (32)
- Dry Screw Pumps (62)
- Dry Scroll Pumps (26)
- E1M Single Stage RVP (4)
- E2M Two Stage RVP (38)
- E2S Two Stage RVP (2)
- EDC Dry Claw (7)
- EDP Dry Pumps (6)
- EDS Dry Screw (11)
- EH Mechanical Booster (22)
- EOSi Oil Sealed Rotary Screw (9)
- EXS Dry Screw (2)
- GV Drystar (2)
- GXS Dry Screw (45)
- HR (3)
- HV8000 Mechanical Booster (4)
- IDX Dry Screw (1)
- Liquid Ring Pumps Double-Stage Plate (3)
- Liquid Ring Pumps Single-Stage Plate (5)
- LR1A (5)
- Mechanical Booster Pumps (33)
- Multistage Roots Pumps (7)
- mXDS Scroll Pumps (6)
- nEDC Dry Claw (17)
- nES Single Stage RVP (9)
- nEXT M Pumps (4)
- nEXT Pumps (40)
- nXDSi Scroll Pumps (12)
- nXLi Dry Multi Stage Roots (2)
- nXRi Dry Multi Stage Roots (5)
- Oil Injected Screw Pumps (9)
- Oil Rotary Vane Pumps Single-Stage (13)
- Oil Rotary Vane Pumps Two-Stage (62)
- Rotary Piston Pumps (2)
- RV Two Stage RVP (22)
- Stokes Mechanical Booster (7)
- Stokes Microvac RPP (2)
- Turbomolecular Pumps MAG (4)
- Turbomolecular Pumps Mechanical (40)
- Vapour Booster Pumps (7)
- XDD1 Diaphragm Pumps (2)
- XDSi Scroll Pumps (8)
Capacity Air / Nitrogen @50Hz Nominal
- 0.108 m³/s (1)
- 0.041 m³/s (1)
- 0.047 m³/s (3)
- 0.467 m³/s (2)
- 0.094 m³/s (1)
Connection vacuum outlet flange
- 1 1/4" BSPP (G) Innengewinde (1)
- 1 1/4" BSPP (oder G 1 1/4") Innengewinde (11)
- 1 1/4" NPT Innengewinde (12)
- 1/8" BSPP (oder G 1/8") Innengewinde (8)
- 11 mm Düse/Stutzen (5)
- 15 mm Düse/Stutzen (6)
- 2 1/2" BBSPP (G) Innengewinde (4)
- 2 1/2" BSPP (or G 2 1/2") Innengewinde (1)
- 2" BSPP (oder G 2") Innengewinde (5)
- 2" NPT Innengewinde (5)
- 3" NPT Innengewinde (2)
- 3/4" BSPP (oder G 3/4") Innengewinde (16)
- 3/8" BSPP (oder G 3/8") Innengewinde (2)
- 6x8mm Schlauchsteckverbindung (6)
- ASA/ANSI 1 1/2" (3)
- ASA/ANSI 10" (4)
- ASA/ANSI 2" (11)
- ASA/ANSI 3" (2)
- ASA/ANSI 4" (3)
- ASA/ANSI 8" (5)
- DN 10 ISO-KF (NW10) (5)
- DN 100 (13)
- DN 100 ISO-F (15)
- DN 16 ISO-KF (NW16) (22)
- DN 160 ISO-F (1)
- DN 25 ISO-KF (NW25) (88)
- DN 40 ISO-F (20)
- DN 40 ISO-KF (NW40) (38)
- DN 50 (11)
- DN 50 ISO-KF (NW50) (23)
- DN 63 ISO-F (6)
- DN 65 (2)
- DN 80 (2)
- Edwards EHVI (4 x 16,70 mm Löcher auf 235,0 PCD) (2)
- Edwards EHVI - 2" Anschluss (3)
- Eingebauter Schalldämpfer (2)
- Geriffelte Düse, geeignet für 9 mm ID Schlauch (8)
- Schlauchtülle 15 mm (7)
Cooling Method
- Luftkühlung (32)
- Luftkühlung (Konvektionskühlung) (38)
- Luftkühlung (Zwangskühlung - Ventilator) (160)
- Wasserkühlung (155)
- Wasserkühlung dirket (7)
- Wasserkühlung indirekt (2)
- Water Cooling (1)
Connection Vacuum Inlet Flange
- 1 1/4" BSPP (G) Innengewinde (1)
- 1 1/4" BSPP (oder G 1 1/4") Innengewinde (11)
- 1 1/4" NPT Innengewinde (12)
- 2" BSPP (oder G 2") Innengewinde (5)
- 2" NPT Innengewinde (5)
- 3" BSPP (G) Innengewinde (3)
- 3/4" BSPP (G) Innengewinde (1)
- 3/4" BSPP (or G 3/4") Female (1)
- ASA/ANSI 10" (4)
- ASA/ANSI 12" (1)
- ASA/ANSI 2" (2)
- ASA/ANSI 3" (12)
- ASA/ANSI 4" (4)
- ASA/ANSI 6" (2)
- ASA/ANSI 8" (5)
- DN 10 ISO-KF (NW10) (5)
- DN 100 (4)
- DN 100 CF (6") (4)
- DN 100 ISO-F (22)
- DN 100 ISO-K (9)
- DN 150 (11)
- DN 16 ISO-KF (NW16) (8)
- DN 160 CF (8") (2)
- DN 160 ISO-F (32)
- DN 160 ISO-K (7)
- DN 200 CF (10") (2)
- DN 200 ISO-F (1)
- DN 200 ISO-K (1)
- DN 25 ISO-KF (NW25) (53)
- DN 250 ISO-F (7)
- DN 250 ISO-K (3)
- DN 320 ISO-F (3)
- DN 40 ISO-F (17)
- DN 40 ISO-KF (NW40) (20)
- DN 50 (4)
- DN 50 ISO-KF (NW50) (1)
- DN 63 CF (4.5") (5)
- DN 63 ISO-F (36)
- DN 63 ISO-K (8)
- DN 65 (2)
- DN 80 (7)
- Edwards EHVI (12 x 20,60 mm Löcher auf 686,0 PCD) (2)
- Edwards EHVI (8x11 mm Löcher auf 387,4 PCD) (3)
- Geriffelte Düse, geeignet für 9 mm ID Schlauch (8)
Pressure Differential Max. @50Hz
- 7000.00 Pa (5)
- 9000.00 Pa (4)
- 11000.00 Pa (4)
- 12000.00 Pa (4)
- 18000.00 Pa (5)
- 19000.00 Pa (4)
- 33300.00 Pa (1)
- 50600.00 Pa (3)
Pressure Differential Max.
- 9000.00 Pa (4)
- 11000.00 Pa (4)
- 11400.00 Pa (1)
- 12000.00 Pa (3)
- 7.000 10⁵ Pa (2)
- 7.500 10⁵ Pa (4)
- 18000.00 Pa (5)
- 19000.00 Pa (4)
- 33300.00 Pa (1)
- 50600.00 Pa (4)
Pressure Differential Max. @60Hz
- 5000.00 Pa (5)
- 6700.00 Pa (4)
- 7500.00 Pa (4)
- 9000.00 Pa (4)
- 12000.00 Pa (4)
- 15000.00 Pa (5)
- 33300.00 Pa (1)
- 50600.00 Pa (3)
Power Total Rated
- 64.00 W (1)
- 80.00 W (22)
- 90.00 W (1)
- 120.00 W (6)
- 160.00 W (10)
- 450.00 W (5)
- 500.00 W (5)
- 520.00 W (6)
- 550.00 W (2)
- 650.00 W (4)
- 660.00 W (3)
- 700.00 W (2)
- 750.00 W (4)
- 1300.00 W (2)
- 1350.00 W (4)
- 1800.00 W (5)
- 10000.00 W (2)
- 11000.00 W (24)
- 11200.00 W (1)
- 12000.00 W (4)
- 15000.00 W (1)
- 18500.00 W (10)
- 2200.00 W (12)
- 2250.00 W (3)
- 22000.00 W (11)
- 22400.00 W (1)
- 22500.00 W (2)
- 29500.00 W (2)
- 3000.00 W (6)
- 3700.00 W (6)
- 30000.00 W (5)
- 37000.00 W (3)
- 4000.00 W (1)
- 5500.00 W (8)
- 55000.00 W (2)
- 6000.00 W (5)
- 6200.00 W (3)
- 7500.00 W (30)
- 7700.00 W (2)
- 8500.00 W (1)
- 9200.00 W (2)
Pressure Ultimate
- 135.00 Pa (1)
- 200.00 Pa (2)
- 235.00 Pa (1)
- 335.00 Pa (1)
- 435.00 Pa (1)
- 535.00 Pa (1)
- 600.00 Pa (1)
- 635.00 Pa (1)
- 735.00 Pa (1)
- 835.00 Pa (1)
- 935.00 Pa (1)
- 3000.00 Pa (3)
- 3300.00 Pa (5)
- 5000.00 Pa (12)
- 7.000 10⁻⁷ Pa (3)
- 0.700 Pa (11)
- 0.070 Pa (1)
- 7500.00 Pa (1)
- 8.00 Pa (4)
- 8700.00 Pa (2)
- 10000.00 Pa (6)
- 1.000 10⁻⁶ Pa (6)
- 1.000 10⁻⁸ Pa (1)
- 10.00 Pa (28)
- 1.000 Pa (25)
- 0.100 Pa (50)
- 1.000 10⁻² Pa (7)
- 1.000 10⁻⁵ Pa (7)
- 14000.00 Pa (5)
- 20000.00 Pa (7)
- 20.00 Pa (1)
- 2.00 Pa (5)
- 0.200 Pa (22)
- 0.020 Pa (4)
- 3.000 10⁻⁶ Pa (16)
- 3.000 10⁻⁸ Pa (2)
- 3.00 Pa (17)
- 0.300 Pa (5)
- 33.00 Pa (1)
- 3.30 Pa (2)
- 0.330 Pa (9)
- 40.00 Pa (7)
- 5.000 10⁻⁷ Pa (7)
- 5.000 10⁻⁸ Pa (7)
- 50.00 Pa (2)
- 5.00 Pa (7)
- 6.000 10⁻⁶ Pa (3)
- 60.00 Pa (1)
Pumping Speed @50Hz
- 2.083 10⁻⁴ m³/s (2)
- 3.333 10⁻⁴ m³/s (1)
- 3.889 10⁻⁴ m³/s (1)
- 4.444 10⁻⁴ m³/s (3)
- 9.167 10⁻⁴ m³/s (5)
- 1.417 10⁻³ m³/s (6)
- 0.010 m³/s (5)
- 0.011 m³/s (2)
- 1.02 m³/s (3)
- 1.02 m³/s (1)
- 0.107 m³/s (1)
- 0.011 m³/s (2)
- 0.012 m³/s (1)
- 0.123 m³/s (2)
- 0.128 m³/s (1)
- 0.015 m³/s (1)
- 1.51 m³/s (1)
- 0.017 m³/s (1)
- 0.178 m³/s (2)
- 0.018 m³/s (3)
- 2.361 10⁻³ m³/s (5)
- 0.021 m³/s (5)
- 2.00 m³/s (4)
- 0.023 m³/s (2)
- 0.222 m³/s (1)
- 0.023 m³/s (1)
- 0.024 m³/s (2)
- 3.333 10⁻³ m³/s (6)
- 4.722 10⁻³ m³/s (10)
- 0.042 m³/s (3)
- 0.044 m³/s (4)
- 0.045 m³/s (1)
- 0.058 m³/s (2)
- 0.067 m³/s (2)
- 7.639 10⁻³ m³/s (7)
- 0.071 m³/s (6)
- 0.072 m³/s (1)
- 0.078 m³/s (4)
- 0.082 m³/s (2)
- 0.861 m³/s (5)
- 9.722 10⁻³ m³/s (6)
Pumping Speed @60Hz
- 2.639 10⁻⁴ m³/s (2)
- 3.889 10⁻⁴ m³/s (1)
- 5.000 10⁻⁴ m³/s (1)
- 5.556 10⁻⁴ m³/s (3)
- 9.722 10⁻⁴ m³/s (6)
- 1.083 10⁻³ m³/s (5)
- 1.722 10⁻³ m³/s (6)
- 0.011 m³/s (2)
- 0.118 m³/s (1)
- 0.012 m³/s (5)
- 0.123 m³/s (2)
- 1.23 m³/s (4)
- 0.013 m³/s (2)
- 0.014 m³/s (1)
- 0.150 m³/s (3)
- 0.018 m³/s (1)
- 1.74 m³/s (1)
- 2.778 10⁻³ m³/s (5)
- 0.020 m³/s (1)
- 0.210 m³/s (2)
- 0.022 m³/s (4)
- 2.40 m³/s (4)
- 0.025 m³/s (5)
- 0.025 m³/s (2)
- 0.283 m³/s (3)
- 0.029 m³/s (2)
- 3.944 10⁻³ m³/s (6)
- 5.667 10⁻³ m³/s (10)
- 0.051 m³/s (2)
- 0.054 m³/s (4)
- 0.056 m³/s (1)
- 0.081 m³/s (2)
- 0.084 m³/s (1)
- 0.085 m³/s (6)
- 9.167 10⁻³ m³/s (7)
- 9.722 10⁻³ m³/s (6)
- 0.096 m³/s (3)
Pumping Speed
- 1.667 10⁻⁴ m³/s (4)
- 2.083 10⁻⁴ m³/s (2)
- 3.333 10⁻⁴ m³/s (3)
- 3.889 10⁻⁴ m³/s (1)
- 5.667 10⁻⁴ m³/s (2)
- 8.333 10⁻⁴ m³/s (6)
- 1.722 10⁻³ m³/s (3)
- 0.011 m³/s (2)
- 1.02 m³/s (4)
- 0.107 m³/s (1)
- 0.011 m³/s (3)
- 0.118 m³/s (1)
- 0.125 m³/s (5)
- 1.25 m³/s (2)
- 12.50 m³/s (2)
- 0.128 m³/s (1)
- 0.135 m³/s (3)
- 0.015 m³/s (1)
- 0.150 m³/s (2)
- 1.53 m³/s (1)
- 0.017 m³/s (1)
- 0.178 m³/s (2)
- 0.018 m³/s (3)
- 2.00 m³/s (5)
- 0.206 m³/s (4)
- 0.022 m³/s (4)
- 2.13 m³/s (2)
- 0.022 m³/s (2)
- 0.222 m³/s (1)
- 0.023 m³/s (1)
- 2.35 m³/s (2)
- 0.024 m³/s (2)
- 0.240 m³/s (3)
- 0.025 m³/s (1)
- 0.278 m³/s (2)
- 3.167 10⁻³ m³/s (3)
- 0.031 m³/s (6)
- 0.300 m³/s (4)
- 0.306 m³/s (1)
- 3.20 m³/s (2)
- 0.033 m³/s (1)
- 0.333 m³/s (4)
- 4.194 10⁻³ m³/s (3)
- 0.400 m³/s (3)
- 4.00 m³/s (5)
- 0.042 m³/s (3)
- 0.044 m³/s (5)
- 0.045 m³/s (1)
- 0.047 m³/s (4)
- 0.051 m³/s (2)
- 0.528 m³/s (7)
- 0.055 m³/s (1)
- 0.056 m³/s (1)
- 0.056 m³/s (1)
- 0.058 m³/s (4)
- 6.111 10⁻³ m³/s (3)
- 0.611 m³/s (4)
- 0.639 m³/s (2)
- 0.067 m³/s (2)
- 0.069 m³/s (7)
- 0.690 m³/s (1)
- 0.700 m³/s (2)
- 0.072 m³/s (2)
- 0.720 m³/s (1)
- 0.730 m³/s (2)
- 0.760 m³/s (2)
- 0.078 m³/s (9)
- 8.333 10⁻³ m³/s (1)
- 0.082 m³/s (2)
- 0.083 m³/s (1)
- 0.084 m³/s (1)
- 0.084 m³/s (8)
- 0.841 m³/s (5)
- 0.086 m³/s (2)
- 0.861 m³/s (5)
- 0.870 m³/s (1)
- 9.722 10⁻³ m³/s (6)
- 0.925 m³/s (1)
- 0.958 m³/s (4)
- 0.096 m³/s (3)
Capacity Air / Nitrogen @60Hz Nominal
- 0.114 m³/s (1)
- 0.122 m³/s (1)
- 0.533 m³/s (2)
- 0.056 m³/s (3)
- 0.081 m³/s (1)
nXDS10i
A73601983
E2M18
A36310905
nXDS15i
A73701983
E2M28
A37333940
RV5
A65301903
E2M80
A36504940
RV8
A65401903
RV3
A65201903
RV12
A65501903
nXR30i
A90301983
nXDS6i
A73501983
E2M18
A36317984
mXDS3
A74401903
EH1200
A30505945
E2M275
A36704940
E2M1.5
A37104919
XDS35i
A73001983
RV12
A65522905
nEXT3207M
B8TM-A0M-61
E2M0.7
A37141919
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